Medium Frequency Physical Vapor Deposited Al₂O₃and SiO₂as Etch-Stop-Layers for Amorphous Indium-Gallium-Zinc-Oxide Thin-Film-Transistors

PDF 본문 자동 추출 실패: [download] not a PDF (Content-Type: text/html, final URL: https://validate.perfdrive.com/fb803c746e9148689b3984a31fccd902/?ssa=c8f3932f-ca0a-423c-ad61-c304498e0835&ssb=05957229474&ssc=https%3A%2F%2Fiopscience.iop.org%2Farticle%2F10.1149%2F2.0201505jss%2Fpdf&ssi=ce453823-cnvj-4608-9e98-5624dc9114e3&ssk=botmanager_support@radware.com&ssm=828624415167174203010221682428047&ssn=a213c6b60a091117ba0f27ab3ced083e604c0365ea35-1dfa-4a77-92503c&sso=83465f5b-51d081f0c9292ffdd2244c21e309daf25c144fc1474c74f8&ssp=60311554041791187952179110896484960&ssq=00967951835721368858810984757321858209180&ssr=MjExLjE4OC41NS4xMTY=&sst=Mozilla/5.0%20(X11;%20Linux%20x86_64)%20AppleWebKit/537.36%20(KHTML,%20like%20Gecko)%20Chrome/126.0%20Safari/537.36%20ai4s-collector/1.0&ssu=&ssv=&ssw=&ssx=eyJyZCI6ImlvcC5vcmciLCJfX3V6bWYiOiI3ZjkwMDAwMzY1ZWEzNS0xZGZhLTRhNzctOWY1Yi01MWQwODFmMGM5MjkxLTE3OTExMTA5ODQ3MjA3MzcyOTk3LTAwNWViMDAzOTJhNWIzYmIwYmUzMDEiLCJ1em14IjoiN2ZjMDAwODk0ZjU1OGQtZTQ5ZC00MGY4LWIyNWItMTdkZDc5NzIyZjcwMS0xNzkxM (2026-10-04 21:52:38)